JPH0458957U - - Google Patents

Info

Publication number
JPH0458957U
JPH0458957U JP10037590U JP10037590U JPH0458957U JP H0458957 U JPH0458957 U JP H0458957U JP 10037590 U JP10037590 U JP 10037590U JP 10037590 U JP10037590 U JP 10037590U JP H0458957 U JPH0458957 U JP H0458957U
Authority
JP
Japan
Prior art keywords
ion
scanning
target
mask
upper base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10037590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10037590U priority Critical patent/JPH0458957U/ja
Publication of JPH0458957U publication Critical patent/JPH0458957U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP10037590U 1990-09-25 1990-09-25 Pending JPH0458957U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10037590U JPH0458957U (en]) 1990-09-25 1990-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10037590U JPH0458957U (en]) 1990-09-25 1990-09-25

Publications (1)

Publication Number Publication Date
JPH0458957U true JPH0458957U (en]) 1992-05-20

Family

ID=31842980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10037590U Pending JPH0458957U (en]) 1990-09-25 1990-09-25

Country Status (1)

Country Link
JP (1) JPH0458957U (en])

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